A zero dimensional model of microwave induced coaxial surface wave discharge fed with hexamethyldisiloxane/oxygen
Efe Kemaneci, Ralf Peter Brinkmann, Felix Mitschker, Peter Awakowicz
70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 8, 2017
A zero-dimensional global model is developed to analyse a microwave induced coaxial discharge of hexamethyl disiloxane/oxygen. The wall flux is analytically estimated and the model is validated by comparing against a variety of measurements for a feeding gas of argon or oxygen. Ion wall flux significantly contributes to the net loss rate of the positive ions. A primary chemical kinetics is added to the oxygen study to investigate the characteristics of the plasma with admixture ratio of 50:100 (HMDSO/O2). Even though the dominant background gas is oxygen, the simulations suggest that the highest positive ion concentration belongs to Si2OC5H+15 that is also confirmed by measurements. The simulation results are compared with existing measurements and an agreement is obtained.