Efficient model for active control of radio frequency magnetron sputtering

Dennis Engel, Dennis Krüger, Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz, Ralf Peter Brinkmann

18. Fach­ta­gung für Plas­ma­tech­no­lo­gie, Göt­tin­gen, Ger­ma­ny, Fe­bru­ary 20-22, 2017

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