The effect of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in single- and dual-frequency capacitively coupled plasmas

Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltán Donkó, Julian Schulze

2017 Plasma Sources Sci. Technol. 26 085006

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