Veröffentlichungen

Simulationen zur Gasdynamik in Sputterprozessen

2013 - Jan Trieschmann, Ralf Peter Brinkmann, Thomas Mussenbrock, Stefan Bienholz, Peter Awakowicz, Ricardo Henrique Brugnara, Nazlim Bagcivan, Kirsten Bobzin

DPG Früh­jahrs­ta­gung 2013, Jena, Ger­ma­ny, 25 February - 01 March

Diagnostik und Steuerung von PIAD-Prozessen

2013 - Jens Harhausen, Rüdiger Foest, Andreas Ohl, Dieter Gäbler, Norbert Kaiser, Olaf Stenzel, Steffen Wilbrandt, Ralf Peter Brinkmann, Benjamin Schröder, Robert Storch, Tim Styrnoll

DPG Frühjahrstagung, 25.02.-01.03 2013, Friedrich-Schiller-Universität, Jena (talk) [DPG-Verhandlungen]

Ion energy distribution functions at the inner surface of a PET bottle in a microwave driven low pressure plasma

2012 - Daniel Szeremley, Mohammed Shihab, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner, Thomas Mussenbrock

Microwave Workshop 2012, Bochum, Germany, 26.11. - 28.11.2012, oral contribution

Ion energy distribution functions at the inner surface of a PET bottle

2012 - Daniel Szeremley, Mohammed Shihab, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner, Thomas Mussenbrock

WELT­PP-15 , Kerk­ra­de, The Nether­lands, 22.-23. November 2012, oral contribution

The Multipole Resonance Probe: Investigation of an Active Plasma Resonance Probe Using 3D-electromagnetic Field Simulations

2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

42nd European Microwave Week, pp. 566-569 Amsterdam, The Netherlands, Oct 28 – Nov 2, 2012 [IEEE-Library]

Analytical Model for the Microwave Driven Double ICP Plasma Jet

2012 - Ali Arshadi, Denis Eremin, Thomas Mussenbrock, Ralf Peter Brinkmann, Peter Awakowicz, Horia-Eugen Porteanu, Roland Gesche, Klaus Wandel

65th Annual Gaseous Electronics Conference, October 22–26, 2012; Austin, Texas

Calculation of ion energy distribution functions at the inner surface of a PET bottle during sterilization processes

2012 - Daniel Szeremley, Simon Steves, Ralf Peter Brinkmann, Peter Awakowicz, Mark J. Kushner, Thomas Mussenbrock

65th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence (GEC), Aus­tin (Texas), USA, 22-26 Oc­to­ber, oral contribution

The Multiple Resonance Probe: A Novel Device for Industry Compatible Plasma Diagnostics

2012 - Ralf Peter Brinkmann, Robert Storch, Martin Lapke, Jens Oberrath, Christian Schulz, Tim Styrnoll, Christian Zietz, Peter Awakowicz, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

65th Annual Gaseous Electronics Conference 2012 , Vol. 57, No. 8 , Austin, Texas, USA, Oct 22–26, 2012

Characterization of Dielectric Deposition Processes Using Active Plasma Resonance Spectroscopy

2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

Kleinheubacher Tagung 2012, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 24-26, 2012

A Novel Radio-Frequency Plasma Probe for Monitoring Systems in Dielectric Deposition Processes

2012 - Christian Schulz, Tim Styrnoll, Martin Lapke, Jens Oberrath, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

International Conference on Electromagnetics in Advanced Applications (ICEAA '12), pp. 728-731, DOI: 10.1109/ICEAA.2012.6328725, Cape Town, South Africa, Sep 2-7, 2012 [IEEE-Library]

Calculation of ion energy distribution functions at the inner surface of a PET bottle during sterilization processes

2012 - Daniel Szeremley, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner, Thomas Mussenbrock

Dok­tor­an­den­kol­lo­qui­um 2012,IGK im Rahmen des SFB-TR 87, Bochum, Germany, 03 Au­gust, oral cont­ri­bu­ti­on

Global models for the microwave driven double icp plasma jet

2012 - Ali Arshadi, Denis Eremin, Thomas Mussenbrock, Ralf Peter Brinkmann, Peter Awakowicz, Horia-Eugen Porteanu, Roland Gesche, Klaus Wandel

39th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence 2012, Edin­burgh, Scott­land, Juli 08-12

Numerical Simulation of a Microwave Driven Low Pressure Plasma for PET Bottle Treatment

2012 - Daniel Szeremley, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner, Thomas Mussenbrock

39th IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence 2012, Edinburgh, Scottland, Juli 08-12

Prozesstaugliche Plasmadiagnostik auf Basis der Multipol-Resonanz-Sonde

2012 - Jens Oberrath, Christian Schulz, Robert Storch, Tim Styrnoll, Martin Lapke, Thomas Mussenbrock, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes

16. GMA/ITG-Fachtagung Sensoren und Messsysteme 2012, Nürnberg, 22.-23. Mai (Proceedings: ISBN 978-3-9813484-0-8)

Prozessüberwachung und Kontrolle mit der Multipol-Resonanz-Sonde

2012 - Ralf Peter Brinkmann, Martin Lapke, Jens Oberrath, Christian Schulz, Robert Storch, Tim Styrnoll, Peter Awakowicz, Thomas Mussenbrock, Thomas Musch, Ilona Rolfes, Christian Zietz

DPG Früh­jahrs­ta­gung 2012, Stutt­gart, Ger­ma­ny, March 12-16

Numerische Simulation von kapazitiven Mehrfrequenzentladungen für Sputteranwendungen

2012 - Daniel Szeremley, Stefan Bienholz, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Mussenbrock

DPG Früh­jahrs­ta­gung 2012, Stuttgart, Ger­ma­ny, 12-16 March

Process Diagnostics and Monitoring Using the Multipole Resonance Probe (MRP)

2011 - Jens Harhausen, Peter Awakowicz, Ralf Peter Brinkmann, Rüdiger Foest, Martin Lapke, Thomas Musch, Thomas Mussenbrock, Jens Oberrath, Andreas Ohl, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll

64th Annual Gaseous Electronics Conference 2011, Salt Lake City, Utah, USA, Nov 14-18, 2011

Active Plasma Resonance Spectroscopy Using The Multipole Resonance Probe

2011 - Christian Schulz, Martin Lapke, Jens Oberrath, Robert Storch, Tim Styrnoll, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

Kleinheubacher Tagung 2011, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 26-28, 2011

Usage of electromagnetic modeling of the multipole resonance probe

2011 - Martin Lapke, Christian Schulz, Jens Oberrath, Robert Storch, Tim Styrnoll, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

Proceedings of the 30th International Conference on Phenomena in Ionized Gases (ICPIG), Belfast, Northern Ireland, Aug 28 - Sep 2, 2011

Simulation and measurements of an inductively coupled hydrogen plasma for sterilization process

2011 - Max Engelhardt, Benjamin Denis, Tim Styrnoll, Thomas Mussenbrock, Peter Awakowicz

3. International Workshop on Radio Frequency Discharges, Dublin, Rep. of Ireland (2011)
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