Veröffentlichungen

Numerische Simulation von kapazitiven Mehrfrequenzentladungen für Sputteranwendungen

2012 - Daniel Szeremley, Stefan Bienholz, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Mussenbrock

DPG Früh­jahrs­ta­gung 2012, Stuttgart, Ger­ma­ny, 12-16 March

Process Diagnostics and Monitoring Using the Multipole Resonance Probe (MRP)

2011 - Jens Harhausen, Peter Awakowicz, Ralf Peter Brinkmann, Rüdiger Foest, Martin Lapke, Thomas Musch, Thomas Mussenbrock, Jens Oberrath, Andreas Ohl, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll

64th Annual Gaseous Electronics Conference 2011, Salt Lake City, Utah, USA, Nov 14-18, 2011

Active Plasma Resonance Spectroscopy Using The Multipole Resonance Probe

2011 - Christian Schulz, Martin Lapke, Jens Oberrath, Robert Storch, Tim Styrnoll, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

Kleinheubacher Tagung 2011, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 26-28, 2011

Usage of electromagnetic modeling of the multipole resonance probe

2011 - Martin Lapke, Christian Schulz, Jens Oberrath, Robert Storch, Tim Styrnoll, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

Proceedings of the 30th International Conference on Phenomena in Ionized Gases (ICPIG), Belfast, Northern Ireland, Aug 28 - Sep 2, 2011

Simulation and measurements of an inductively coupled hydrogen plasma for sterilization process

2011 - Max Engelhardt, Benjamin Denis, Tim Styrnoll, Thomas Mussenbrock, Peter Awakowicz

3. International Workshop on Radio Frequency Discharges, Dublin, Rep. of Ireland (2011)

Determination of effective UV/VUV radiation of a low pressure inductively coupled plasma for sterilization of spores

2011 - Benjamin Denis, Nikita Bibinov, Thomas Mussenbrock, Peter Awakowicz

20th International Symposium on Plasma Chemistry (ISPC), Philadelphia, USA (2011)

Simultane Bestimmung von Elektronendichte und Temperatur mit der Multipolresonanzsonde in technischen Plasmen

2011 - Martin Lapke, Tim Styrnoll, Jens Oberrath, Christian Schulz, Robert Storch, Ralf Peter Brinkmann, Peter Awakowicz, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

DPG Früh­jahrs­ta­gung 2011, Kiel, Germany, March 28-31, 2011

Bestimmung von Elektronendichte und Temperatur mit der Multipol-Resonaz-Sonde in Technologischen Plasmen

2011 - Tim Styrnoll, Martin Lapke, Jens Oberrath, Christian Schulz, Robert Storch, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

PT 15, Stuttgart, Ger­ma­ny, Feb 28 - March 02, 2011

Funktionalanalytische Beschreibung der Multipol-Resonanz-Sonde

2011 - Jens Oberrath, Martin Lapke, Thomas Mussenbrock, Ralf Peter Brinkmann, Christian Schulz, Ilona Rolfes, Thomas Musch, Tim Styrnoll, Peter Awakowicz

PT 15, Stuttgart, Ger­ma­ny, Feb 28 - March 02, 2011

Simulation und Messungen einer doppelt induktiv gekoppelten Wasserstoffentladung zu Sterilisationszwecken

2011 - Max Engelhardt, Benjamin Denis, Tim Styrnoll, Nikita Bibinov, Thomas Mussenbrock, Peter Awakowicz

PT 15, Stuttgart, Ger­ma­ny, 28.02-02.03 2011,

Sterilisation und Proteinentfernung in einem induktiv gekoppelten Niederdruck-Plasma

2011 - Benjamin Denis, Max Engelhardt, Nikita Bibinov, Thomas Mussenbrock, Peter Awakowicz

PT 15, Stuttgart, Ger­ma­ny, 28.02-02.03 2011,

The Multipole Resonance Probe

2010 - Jens Oberrath, Martin Lapke, Christian Schulz, Robert Storch, Tim Styrnoll, Christian Zietz, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

Section Days Research School, Nov 03-05, 2010

The multipole resonance probe: Realization of an optimized radio-frequency plasma probe based on active plasma resonance spectroscopy

2010 - Christian Schulz, Martin Lapke, Jens Oberrath, Robert Storch, Tim Styrnoll, Christian Zietz, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

1st Middle East Conference on Antennas and Propagation (MECAP 2010), pp. 1-5, DOI: 10.1109/MECAP.2010.5724175, Cairo, Egypt, Oct 20-22, 2010 [IEEE-Library]

Darwin particle-in-cell code simulations of dual frequency capacitively coupled discharges on graphical processing units

2010 - Denis Eremin, Philipp Mertmann, Markus Gebhardt, Thomas Mussenbrock, Ralf Peter Brinkmann

63rd Annual Ga­se­ous Elec­tro­nics Con­fe­rence 2010, Paris, Fran­ce, 04-08 Oc­to­ber

Electron density measurements in technological plasmas using the Multipole Resonance Probe

2010 - Tim Styrnoll, Martin Lapke, Christian Schulz, Robert Storch, Jens Oberrath, Thomas Musch, Ilona Rolfes, Peter Awakowicz, Thomas Mussenbrock, Ralf Peter Brinkmann

63rd Annual Ga­se­ous Elec­tro­nics Con­fe­rence 2010, Paris, Fran­ce, Oc­to­ber 4-8, 2010

Particle in cell simulation of CCPs using graphics processing units

2010 - Philipp Mertmann, Denis Eremin, Thomas Mussenbrock, Peter Awakowicz

63rd Annual Ga­se­ous Elec­tro­nics Con­fe­rence 2010, Paris, Fran­ce, 04-08 Oc­to­ber

PIC simulations of low pressure plasmas using graphics processing units

2010 - Philipp Mertmann, Denis Eremin, Thomas Mussenbrock, Peter Awakowicz

63rd Ga­se­ous Elec­tro­nics Con­fe­rence 2010, Paris, Fran­ce, Oc­to­ber 04-08

Radio-Frequency Plasma Diagnostics with the Multipole Resonance Probe

2010 - Christian Schulz, Martin Lapke, Jens Oberrath, Robert Storch, Tim Styrnoll, Christian Zietz, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

Kleinheubacher Tagung 2010, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Oct 4-6, 2010

Simulation of a inductively coupled hydrogen plasma for sterilization processes

2010 - Max Engelhardt, Benjamin Denis, Thomas Mussenbrock, Peter Awakowicz

63rd Annual Ga­se­ous Elec­tro­nics Con­fe­rence 2010, Paris, Fran­ce, 04-08 Oc­to­ber

The Multipole Resonance Probe: A new concept of plasma resonance spectroscopy

2010 - Lapke, Martin, Jens Oberrath, Tim Styrnoll, Thomas Mussenbrock, Peter Awakowicz, Ralf Peter Brinkmann

Doktoranden Workshop 2010, FOR 1123 and SFB/TR 87, 9-10 August
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