Veröffentlichungen

The Effects of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Capacitively Coupled Plasmas

2017 - Julian Schulze, Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltan Donko

70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 9, 2017

Sputtering process data interpreted by heavy particle simulations

2017 - Jan Trieschmann, Stefan Ries, Nikita Bibinov, Peter Awakowicz, Stanislav Mraz, Jochen M. Schneider, Thomas Mussenbrock

Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017

The Effects of Elementary Surface Processes on the Plasma Parameters in Capacitively Coupled Radiofrequency Discharges

2017 - Aranka Derzsi, Benedek Horvath, Manaswi Daksha, Birk Berger, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltan Donko, Julian Schulze

Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017

Realisierung einer temperaturstabilen Multipol -Resonanz -Sonde in LTCC -Technologie für die Plasmadiagnostik

2017 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Uhlig, Alexandra Serva, Peter Awakowicz, Ilona Rolfes

Klein­heu­ba­cher Ta­gung 2017, U.R.S.I. Lan­des­aus­schuss in der Bun­des­re­pu­blik Deutsch­land e.V., Mil­ten­berg, Ger­ma­ny, Sep 25-27, 2017

Effects of fast neutrals and energy-dependent secondary electron emission yield in PIC/MCC simulations of single- and dual-frequency CCPs

2017 - Aranka Derzsi, Ihor Korolov, Edmund Schüngel, Manaswi Daksha, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltán Donkó, Julian Schulze

invited talk, 6th Workshop on Radio-frequency Discharges, La Badine, La Presqu'île de Giens, France, 21-23 May 2017

Fast broadband reflectometer for diagnostics of plasma processes based on spatially distributed multipole resonance probes

2017 - Malte Mallach, Moritz Oberberg, Peter Awakowicz, Thomas Musch

2017 IEEE MTT-S International Microwave Symposium (IMS), Honolulu, HI, USA, 2017, pp. 1022-1025. doi:10.1109/MWSYM.2017.8058765

From neutral particles to highly ionized plasmas: Heavy particle transport in technological sputtering systems

2017 - Jan Trieschmann, Stefan Ries, Dennis Krüger, Frederik Schmidt, Tobias Gergs, Nikita Bibinov, Peter Awakowicz, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock

18. Fachtagung für Plasmatechnologie, Göttingen, Germany, February 20-22, 2017 (invited)

Efficient model for active control of radio frequency magnetron sputtering

2017 - Dennis Engel, Dennis Krüger, Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz, Ralf Peter Brinkmann

18. Fach­ta­gung für Plas­ma­tech­no­lo­gie, Göt­tin­gen, Ger­ma­ny, Fe­bru­ary 20-22, 2017

Global model for active control of capacitive radio frequency magnetron discharges

2016 - Dennis Engel, Dennis Krüger, Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz, Ralf Peter Brinkmann

69th Annual Gaseous Electronics Conference, Bochum, Germany, October 13, 2016.

A self-consistent global model of surface wave discharges with cylindrical or co-axial structures: Ar or O2 fed with continuous or pulse-modulated power input

2016 - Efe Kemaneci, Felix Mitschker, Marcel Rudolph, Daniel Szeremley, Denis Eremin, Peter Awakowicz, Ralf Peter Brinkmann

69th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Bo­chum, Ger­ma­ny, Oc­to­ber 14, 2016

Zero dimensional model of atmospheric SMD discharge and afterglow in humid air

2016 - Ryan Smith, Efe Kemaneci, Björn Offerhaus, Katharina Stapelmann, Ralf Peter Brinkmann

69th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Bo­chum, Ger­ma­ny, Oc­to­ber 14, 2016

Collision Frequency Determination of Low-Pressure Plasmas based on RF-Reflectometry

2016 - Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

46th European Microwave Conference (EuMC), London, United Kingdom, Oct 4-6, 2016

Numerical simulations of a microwave driven low pressure plasma

2016 - Daniel Szeremley, Thomas Mussenbrock, Ralf Peter Brinkmann, Felix Mitschker, Simon Steves, Peter Awakowicz, Mark J. Kushner, Denis Eremin

43nd IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence (ICOPS), Banff, Kanada, June 19-23, 2016 (oral cont­ri­bu­ti­on)

Zero dimensional model atmospheric SMD discharge and afterglow in humid air

2016 - Ryan T Smith, Efe Kemaneci, Björn Offerhaus, Katharina Stapelmann, Ralf Peter Brinkmann

ICOPS 2016, Banff, Alberta, Canada, June 19-23 2016

Influence of Ion Energy and Ion-to-Growth Flux Ratio on PVD Coatings in a Multi-Frequency Capacitively Coupled Plasma

2016 - Stefan Ries, Dario Grochla, Jan Trieschmann, Denis Eremin, Carles Corbella, Thomas Mussenbrock, Alfred Ludwig, Achim von Keudell, Peter Awakowicz

42nd International Conference on Metallurgical Coatings and Thin Films, San Diego (California), USA, 27. April 2016.

Monitoring of Low Pressure Plasmas with a Calibrated Probe

2016 - Jan Niclas Runkel, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

Ger­man Micro­wa­ve Con­fe­rence (GeMiC 2016), pp. 43-46, doi: 10.1109/GEMIC.2016.7461551, Bo­chum, Ger­ma­ny, March 14-16, 2016 [IEEE Library]

Monitoring of Low Pressure Plasmas with a Calibrated Probe

2016 - Jan Niclas Runkel, Christian Schulz, Ilona Rolfes, Moritz Oberberg, Peter Awakowicz

2016 GERMAN MICROWAVE CONFERENCE (GEMIC) Book Series: German Microwave Conference Pages: 43-46 Published: 2016

Ion Energy Distribution Functions in a Microwave Driven Plasma Discharge

2015 - Daniel Szeremley, Felix Mitschker, Simon Steves, Peter Awakowicz, Ralf Peter Brinkmann, Mark J. Kushner, Thomas Mussenbrock

68th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence/9th In­ter­na­tio­nal Con­fe­rence on Re­ac­tive Plas­mas/33rd Sym­po­si­um on Plas­ma Pro­ces­sing, Ho­no­lu­lu, USA, Oc­to­ber 12-15 2015 (oral contribution)

Kinetische Simulation der Dynamik gesputterten Aluminiums in kapazitiv gekoppelten Mehrfrequenzplasmen

2015 - Jan Trieschmann, Stefan Ries, Stefan Bienholz, Nikita Bibinov, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Mussenbrock

DPG Früh­jahrs­ta­gung 2015, Bochum, Ger­ma­ny, 2-5 March

Supervision and Control of Medical Sterilization Processes Utilizing the Multipole Resonance Probe

2013 - Christian Schulz, Tim Styrnoll, Peter Awakowicz, Ilona Rolfes

IEEE MTT-S International Microwave Workshop Series on RF and Wireless Technologies for Biomedical and Healthcare Applications (IMWS-BIO 2013), pp. 1-3, DOI: 10.1109/IMWS-BIO.2013.6756158, Singapore, Dec 9 – 11, 2013 [IEEE-Library]
Seite: