Veröffentlichungen

A Temperature Stable Probe for Plasma Diagnostics in LTCC

2018 - Peter Uhlig, Alexandra Serwa, Dennis Pohle, Christian Schulz, Moritz Oberberg, Ilona Rolfes, Peter Awakowicz

IMAPS/ACerS 14th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2018), Aveiro, Portugal, April 18–20, 2018

An Advanced High-temperature Stable Multipole Resonance Probe for Industry Compatible Plasma Diagnostics

2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes

German Microwave Conference (GeMiC 2018), pp. 235-238, doi: 10.23919/GEMIC.2018.8335073, Freiburg, Germany, March 12–14, 2018 [IEEE Library]

The Multipole Resonance Probe as a powerful diagnostic tool for industrial plasma processes

2018 - Moritz Oberberg, Stefan Ries, Christian Wölfel, Jens Harhausen, Dennis Pohle, Christian Schulz, Oliver Schmidt, Wladislaw Dobrygin, Ilona Rolfes, Ralf Peter Brinkmann, Peter Awakowicz

DPG Frühjahrstagung 2018, Erlangen, Germany, March 04–09, 2018

Neural network based linearization and control of sputter processes

2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze

Proc. of the 11th Asian Control Conference, pp. 2831-2836, Gold Coast, Australia, 2017

Control-oriented modeling and stabilization of reactive sputter processes

2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze

16th International Conference on Reactive Sputter Deposition, Plzeň, Czech Republic, 2017

The Effects of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Capacitively Coupled Plasmas

2017 - Julian Schulze, Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltan Donko

70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 9, 2017

A zero dimensional model of microwave induced coaxial surface wave discharge fed with hexamethyldisiloxane/oxygen

2017 - Efe Kemaneci, Ralf Peter Brinkmann, Felix Mitschker, Peter Awakowicz

70th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Pitts­burgh (Penn­syl­va­nia), USA, No­vem­ber 8, 2017

Comparison of Zero Dimensional Plasma Chemistry Model with Ozone Absorption Spectroscopy Measurements

2017 - Ryan Smith, Efe Kemaneci, Björn Offerhaus, Friederike Kogelheide, Nikita Bibinov, Peter Awakowicz, Ralf Peter Brinkmann, Katharina Stapelmann

70th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Pitts­burgh (Penn­syl­va­nia), USA, No­vem­ber 8, 2017

Sputtering process data interpreted by heavy particle simulations

2017 - Jan Trieschmann, Stefan Ries, Nikita Bibinov, Peter Awakowicz, Stanislav Mraz, Jochen M. Schneider, Thomas Mussenbrock

Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017

The application of the multipole resonance probe to industrially relevant processes

2017 - Moritz Oberberg, Marcel Fiebrandt, Stefan Ries, Christian Wölfel, Peter Awakowicz

70th Annual Gaseous Electronics Conference, Pittsburgh, USA, 2017

The Effects of Elementary Surface Processes on the Plasma Parameters in Capacitively Coupled Radiofrequency Discharges

2017 - Aranka Derzsi, Benedek Horvath, Manaswi Daksha, Birk Berger, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltan Donko, Julian Schulze

Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017

Model identification of nonlinear sputter processes

2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze

C. Wölfel, S. Kockmann, P. Awakowicz, J. Lunze: Model identification of nonlinear sputter processes Proc. of the 17th International Conference on Control, Automation and Systems, pp. 182-187, Jeju, Korea, 2017.

Realisierung einer temperaturstabilen Multipol -Resonanz -Sonde in LTCC -Technologie für die Plasmadiagnostik

2017 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Uhlig, Alexandra Serwa, Peter Awakowicz, Ilona Rolfes

Klein­heu­ba­cher Ta­gung 2017, U.R.S.I. Lan­des­aus­schuss in der Bun­des­re­pu­blik Deutsch­land e.V., Mil­ten­berg, Ger­ma­ny, Sep 25-27, 2017

Ein Ansatz zur Modellierung und Regelung reaktiver Zerstäubungsprozesse

2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze

GMA-FA 1.30 Modellbildung, Identifikation und Simulation in der Automatisierungstechnik, Anif, 2017

Robust high-gain control of nonlinear reactive sputter processes

2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze

Proc. of the 1st IEEE Conference on Control Technology and Applications, pp. 25-30, Hawai'i, USA, 2017

Model reduction and identification of nonlinear reactive sputter processes

2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze

Proc. of the 20th IFAC World Congress, pp. 14292-14298, Toulouse, France, 2017

Tuning Rule for Linear Control of Nonlinear Reactive Sputter Processes

2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze

Proc. of the 21st International Conference on Process Control (PC), pp. 109-114, Štrbské Pleso, Slovakia, 2017

Effects of fast neutrals and energy-dependent secondary electron emission yield in PIC/MCC simulations of single- and dual-frequency CCPs

2017 - Aranka Derzsi, Ihor Korolov, Edmund Schüngel, Manaswi Daksha, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltán Donkó, Julian Schulze

invited talk, 6th Workshop on Radio-frequency Discharges, La Badine, La Presqu'île de Giens, France, 21-23 May 2017

Fast broadband reflectometer for diagnostics of plasma processes based on spatially distributed multipole resonance probes

2017 - Malte Mallach, Moritz Oberberg, Peter Awakowicz, Thomas Musch

2017 IEEE MTT-S International Microwave Symposium (IMS), Honolulu, HI, USA, 2017, pp. 1022-1025. doi:10.1109/MWSYM.2017.8058765

From neutral particles to highly ionized plasmas: Heavy particle transport in technological sputtering systems

2017 - Jan Trieschmann, Stefan Ries, Dennis Krüger, Frederik Schmidt, Tobias Gergs, Nikita Bibinov, Peter Awakowicz, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock

18. Fachtagung für Plasmatechnologie, Göttingen, Germany, February 20-22, 2017 (invited)
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