Veröffentlichungen

A Temperature Stable Probe for Plasma Diagnostics in LTCC

2018 - Peter Uhlig, Alexandra Serwa, Dennis Pohle, Christian Schulz, Moritz Oberberg, Ilona Rolfes, Peter Awakowicz

IMAPS/ACerS 14th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2018), Aveiro, Portugal, April 18–20, 2018

An Advanced High-temperature Stable Multipole Resonance Probe for Industry Compatible Plasma Diagnostics

2018 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Alexandra Serwa, Peter Uhlig, Peter Awakowicz, Ilona Rolfes

German Microwave Conference (GeMiC 2018), pp. 235-238, doi: 10.23919/GEMIC.2018.8335073, Freiburg, Germany, March 12–14, 2018 [IEEE Library]

The Multipole Resonance Probe as a powerful diagnostic tool for industrial plasma processes

2018 - Moritz Oberberg, Stefan Ries, Christian Wölfel, Jens Harhausen, Dennis Pohle, Christian Schulz, Oliver Schmidt, Wladislaw Dobrygin, Ilona Rolfes, Ralf Peter Brinkmann, Peter Awakowicz

DPG Frühjahrstagung 2018, Erlangen, Germany, March 04–09, 2018

Neural network based linearization and control of sputter processes

2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze

Proc. of the 11th Asian Control Conference, pp. 2831-2836, Gold Coast, Australia, 2017

Control-oriented modeling and stabilization of reactive sputter processes

2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze

16th International Conference on Reactive Sputter Deposition, Plzeň, Czech Republic, 2017

The Effects of Realistic Heavy Particle Induced Secondary Electron Emission Coefficients on the Electron Power Absorption Dynamics in Capacitively Coupled Plasmas

2017 - Julian Schulze, Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltan Donko

70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 9, 2017

A zero dimensional model of microwave induced coaxial surface wave discharge fed with hexamethyldisiloxane/oxygen

2017 - Efe Kemaneci, Ralf Peter Brinkmann, Felix Mitschker, Peter Awakowicz

70th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Pitts­burgh (Penn­syl­va­nia), USA, No­vem­ber 8, 2017

Comparison of Zero Dimensional Plasma Chemistry Model with Ozone Absorption Spectroscopy Measurements

2017 - Ryan Smith, Efe Kemaneci, Björn Offerhaus, Friederike Kogelheide, Nikita Bibinov, Peter Awakowicz, Ralf Peter Brinkmann, Katharina Stapelmann

70th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Pitts­burgh (Penn­syl­va­nia), USA, No­vem­ber 8, 2017

Sputtering process data interpreted by heavy particle simulations

2017 - Jan Trieschmann, Stefan Ries, Nikita Bibinov, Peter Awakowicz, Stanislav Mraz, Jochen M. Schneider, Thomas Mussenbrock

Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017

The application of the multipole resonance probe to industrially relevant processes

2017 - Moritz Oberberg, Marcel Fiebrandt, Stefan Ries, Christian Wölfel, Peter Awakowicz

70th Annual Gaseous Electronics Conference, Pittsburgh, USA, 2017

The Effects of Elementary Surface Processes on the Plasma Parameters in Capacitively Coupled Radiofrequency Discharges

2017 - Aranka Derzsi, Benedek Horvath, Manaswi Daksha, Birk Berger, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltan Donko, Julian Schulze

Workshop of the 70th Annual Gaseous Electronics Conference, Pittsburgh (Pennsylvania), USA, November 6, 2017

Model identification of nonlinear sputter processes

2017 - Christian Wölfel, Sven Kockmann, Peter Awakowicz, Jan Lunze

C. Wölfel, S. Kockmann, P. Awakowicz, J. Lunze: Model identification of nonlinear sputter processes Proc. of the 17th International Conference on Control, Automation and Systems, pp. 182-187, Jeju, Korea, 2017.

Realisierung einer temperaturstabilen Multipol -Resonanz -Sonde in LTCC -Technologie für die Plasmadiagnostik

2017 - Dennis Pohle, Christian Schulz, Moritz Oberberg, Peter Uhlig, Alexandra Serwa, Peter Awakowicz, Ilona Rolfes

Klein­heu­ba­cher Ta­gung 2017, U.R.S.I. Lan­des­aus­schuss in der Bun­des­re­pu­blik Deutsch­land e.V., Mil­ten­berg, Ger­ma­ny, Sep 25-27, 2017

Ein Ansatz zur Modellierung und Regelung reaktiver Zerstäubungsprozesse

2017 - Christian Wölfel, Ralf Peter Brinkmann, Peter Awakowicz, Jan Lunze

GMA-FA 1.30 Modellbildung, Identifikation und Simulation in der Automatisierungstechnik, Anif, 2017

Robust high-gain control of nonlinear reactive sputter processes

2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze

Proc. of the 1st IEEE Conference on Control Technology and Applications, pp. 25-30, Hawai'i, USA, 2017

The effect of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in single- and dual-frequency capacitively coupled plasmas

2017 - Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltán Donkó, Julian Schulze

2017 Plasma Sources Sci. Technol. 26 085006 [Link]

Model reduction and identification of nonlinear reactive sputter processes

2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze

Proc. of the 20th IFAC World Congress, pp. 14292-14298, Toulouse, France, 2017

Tuning Rule for Linear Control of Nonlinear Reactive Sputter Processes

2017 - Christian Wölfel, Peter Awakowicz, Jan Lunze

Proc. of the 21st International Conference on Process Control (PC), pp. 109-114, Štrbské Pleso, Slovakia, 2017

Effects of fast neutrals and energy-dependent secondary electron emission yield in PIC/MCC simulations of single- and dual-frequency CCPs

2017 - Aranka Derzsi, Ihor Korolov, Edmund Schüngel, Manaswi Daksha, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltán Donkó, Julian Schulze

invited talk, 6th Workshop on Radio-frequency Discharges, La Badine, La Presqu'île de Giens, France, 21-23 May 2017

A global model of cylindrical and coaxial surface-wave discharges

2017 - Efe Kemaneci, Felix Mitschker, Marcel Rudolph, Daniel Szeremley, Denis Eremin, Peter Awakowicz, Ralf Peter Brinkmann

J. Phys. D: Appl. Phys. 50 245203, 2017 [JPhysD:Appl Phys]

Fast broadband reflectometer for diagnostics of plasma processes based on spatially distributed multipole resonance probes

2017 - Malte Mallach, Moritz Oberberg, Peter Awakowicz, Thomas Musch

2017 IEEE MTT-S International Microwave Symposium (IMS), Honolulu, HI, USA, 2017, pp. 1022-1025. doi:10.1109/MWSYM.2017.8058765

From neutral particles to highly ionized plasmas: Heavy particle transport in technological sputtering systems

2017 - Jan Trieschmann, Stefan Ries, Dennis Krüger, Frederik Schmidt, Tobias Gergs, Nikita Bibinov, Peter Awakowicz, Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock

18. Fachtagung für Plasmatechnologie, Göttingen, Germany, February 20-22, 2017 (invited)

Efficient model for active control of radio frequency magnetron sputtering

2017 - Dennis Engel, Dennis Krüger, Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz, Ralf Peter Brinkmann

18. Fach­ta­gung für Plas­ma­tech­no­lo­gie, Göt­tin­gen, Ger­ma­ny, Fe­bru­ary 20-22, 2017

Tissue differentiation by means of high resolution optical emission spectroscopy during electrosurgical intervention

2017 - Buerger, Ines, Scharpf, Marcus, Hennenlotter, Joerg, Nuessle, Daniela, Spether, Dominik, Neugebauer, Alexander, Nikita Bibinov, Stenzl, Arnulf, Fend, Falko, Enderle, Markus, Peter Awakowicz

JOURNAL OF PHYSICS D-APPLIED PHYSICS Volume: 50 Issue: 3 Article Number: 035401 DOI: 10.1088/1361-6463/aa4ed3 Published: JAN 25 2017 [URL]

The effect of UV radiation from oxygen and argon plasma on the adhesion of organosilicon coatings on polypropylene

2017 - Jaritz, M, Behm, H, Hopmann, Ch, Kirchheim, D, Felix Mitschker, Peter Awakowicz, Dahlmann, R

JOURNAL OF PHYSICS D-APPLIED PHYSICS Volume: 50 Issue: 1 Article Number: 015201 DOI: 10.1088/1361-6463/50/1/015201 Published: JAN 11 2017 [URL]

Silicon surface modifications produced by non-equilibrium He, Ne and Kr plasma jets

2017 - Max Engelhardt, Kartaschew, Konstantin, Nikita Bibinov, Havenith, Martina, Peter Awakowicz

JOURNAL OF PHYSICS D-APPLIED PHYSICS Volume: 50 Issue: 1 Article Number: 015206 DOI: 10.1088/1361-6463/50/1/015206 Published: JAN 11 2017 [URL]

VUV absorption spectroscopy of bacterial spores and DNA components

2017 - Marcel Fiebrandt, Jan Lackmann, Raguse, Marina, Moeller, Ralf, Peter Awakowicz, Katharina Stapelmann

PLASMA PHYSICS AND CONTROLLED FUSION Volume: 59 Issue: 1 Special Issue: SI Article Number: 014010 DOI: 10.1088/0741-3335/59/1/014010 Published: JAN 2017 [URL]

Global model for active control of capacitive radio frequency magnetron discharges

2016 - Dennis Engel, Dennis Krüger, Christian Wölfel, Moritz Oberberg, Jan Lunze, Peter Awakowicz, Ralf Peter Brinkmann

69th Annual Gaseous Electronics Conference, Bochum, Germany, October 13, 2016.

A self-consistent global model of surface wave discharges with cylindrical or co-axial structures: Ar or O2 fed with continuous or pulse-modulated power input

2016 - Efe Kemaneci, Felix Mitschker, Marcel Rudolph, Daniel Szeremley, Denis Eremin, Peter Awakowicz, Ralf Peter Brinkmann

69th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Bo­chum, Ger­ma­ny, Oc­to­ber 14, 2016

Zero dimensional model of atmospheric SMD discharge and afterglow in humid air

2016 - Ryan Smith, Efe Kemaneci, Björn Offerhaus, Katharina Stapelmann, Ralf Peter Brinkmann

69th An­nual Ga­se­ous Elec­tro­nics Con­fe­rence, Bo­chum, Ger­ma­ny, Oc­to­ber 14, 2016

Change of the arc attachment mode and its effect on the lifetime in automotive high intensity discharge lamps

2016 - Alexander Alexejev, Flesch, Peter, Jürgen Mentel, Peter Awakowicz

JOURNAL OF APPLIED PHYSICS Volume: 120 Issue: 13 Article Number: 133301 DOI: 10.1063/1.4963280 Published: OCT 7 2016 [URL]

Collision Frequency Determination of Low-Pressure Plasmas based on RF-Reflectometry

2016 - Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

46th European Microwave Conference (EuMC), London, United Kingdom, Oct 4-6, 2016

Spectroscopic studies of microwave plasmas containing hexamethyldisiloxane

2016 - Nave, A. S. C, Felix Mitschker, Peter Awakowicz, Roepcke, J

JOURNAL OF PHYSICS D-APPLIED PHYSICS Volume: 49 Issue: 39 Article Number: 395206 DOI: 10.1088/0022-3727/49/39/395206 Published: OCT 5 2016 [URL]

Cold atmospheric-pressure plasma and bacteria: understanding the mode of action using vibrational microspectroscopy

2016 - Kartaschew, Konstantin, Sabrina Baldus, Mischo, Meike, Bruendermann, Erik, Peter Awakowicz, Havenith, Martina

JOURNAL OF PHYSICS D-APPLIED PHYSICS Volume: 49 Issue: 37 Article Number: 374003 DOI: 10.1088/0022-3727/49/37/374003 Published: SEP 21 2016 [URL]

Sterilization of beehive material with a double inductively coupled low pressure plasma

2016 - Priehn, M, Benjamin Denis, Aumeier, P, Kirchner, W. H, Peter Awakowicz, Leichert, L. I

JOURNAL OF PHYSICS D-APPLIED PHYSICS Volume: 49 Issue: 37 Article Number: 374002 DOI: 10.1088/0022-3727/49/37/374002 Published: SEP 21 2016 [URL]

Understanding of the importance of the spore coat structure and pigmentation in the Bacillus subtilis spore resistance to low-pressure plasma sterilization

2016 - Raguse, Marina, Marcel Fiebrandt, Benjamin Denis, Katharina Stapelmann, Eichenberger, Patrick, Driks, Adam, Eaton, Peter, Peter Awakowicz, Moeller, Ralf

JOURNAL OF PHYSICS D-APPLIED PHYSICS Volume: 49 Issue: 28 Article Number: 285401 DOI: 10.1088/0022-3727/49/28/285401 Published: JUL 20 2016 [URL]

Numerical simulations of a microwave driven low pressure plasma

2016 - Daniel Szeremley, Thomas Mussenbrock, Ralf Peter Brinkmann, Felix Mitschker, Simon Steves, Peter Awakowicz, Mark J. Kushner, Denis Eremin

43nd IEEE In­ter­na­tio­nal Con­fe­rence on Plas­ma Sci­ence (ICOPS), Banff, Kanada, June 19-23, 2016 (oral cont­ri­bu­ti­on)

Zero dimensional model atmospheric SMD discharge and afterglow in humid air

2016 - Ryan T Smith, Efe Kemaneci, Björn Offerhaus, Katharina Stapelmann, Ralf Peter Brinkmann

ICOPS 2016, Banff, Alberta, Canada, June 19-23 2016

Influence of Ion Energy and Ion-to-Growth Flux Ratio on PVD Coatings in a Multi-Frequency Capacitively Coupled Plasma

2016 - Stefan Ries, Dario Grochla, Jan Trieschmann, Denis Eremin, Carles Corbella, Thomas Mussenbrock, Alfred Ludwig, Achim von Keudell, Peter Awakowicz

42nd International Conference on Metallurgical Coatings and Thin Films, San Diego (California), USA, 27. April 2016.

The anodic emitter effect and its inversion demonstrated by temperature measurements at doped and undoped tungsten electrodes

2016 - Thomas Höbing, Andre Bergner, Patrick Hermanns, Jürgen Mentel, Peter Awakowicz

JOURNAL OF PHYSICS D-APPLIED PHYSICS Volume: 49 Issue: 15 Article Number: 155504 DOI: 10.1088/0022-3727/49/15/155504 Published: APR 20 2016 [URL]

Interaction of an argon plasma jet with a silicon wafer

2016 - Max Engelhardt, Ramasamy Pothiraja, Kartaschew, Konstantin, Nikita Bibinov, Havenith, Martina, Peter Awakowicz

JOURNAL OF PHYSICS D-APPLIED PHYSICS Volume: 49 Issue: 14 Article Number: 145201 DOI: 10.1088/0022-3727/49/14/145201 Published: APR 13 2016 [URL]

Improvement of Biological Indicators by Uniformly Distributing Bacillus subtilis Spores in Monolayers To Evaluate Enhanced Spore Decontamination Technologies

2016 - Raguse, Marina, Marcel Fiebrandt, Katharina Stapelmann, Madela, Kazimierz, Laue, Michael, Jan Lackmann, Thwaite, Joanne E., Setlow, Peter, Peter Awakowicz, Moeller, Ralf

DOI: 10.1128/AEM.03934-15

On the physics of a large CCP discharge

2016 - Denis Eremin, Stefan Bienholz, Daniel Szeremley, Jan Trieschmann, Stefan Ries, Peter Awakowicz, Thomas Mussenbrock, Ralf Peter Brinkmann

PLASMA SOURCES SCIENCE & TECHNOLOGY Volume: 25 Issue: 2 Article Number: 025020 DOI: 10.1088/0963-0252/25/2/025020 Published: APR 2016 [URL]

Antenna induced hot restrike of a ceramic metal halide lamp recorded by high-speed photography

2016 - Patrick Hermanns, Thomas Höbing, Andre Bergner, Cornelia Ruhrmann, Peter Awakowicz, Jürgen Mentel

JOURNAL OF APPLIED PHYSICS Volume: 119 Issue: 11 Article Number: 113304 DOI: 10.1063/1.4943621 Published: MAR 21 2016 [URL]

Monitoring of Low Pressure Plasmas with a Calibrated Probe

2016 - Jan Niclas Runkel, Christian Schulz, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

Ger­man Micro­wa­ve Con­fe­rence (GeMiC 2016), pp. 43-46, doi: 10.1109/GEMIC.2016.7461551, Bo­chum, Ger­ma­ny, March 14-16, 2016 [IEEE Library]

Monitoring of Low Pressure Plasmas with a Calibrated Probe

2016 - Jan Niclas Runkel, Christian Schulz, Ilona Rolfes, Moritz Oberberg, Peter Awakowicz

2016 GERMAN MICROWAVE CONFERENCE (GEMIC) Book Series: German Microwave Conference Pages: 43-46 Published: 2016

On the physics of a large CCP discharge

2016 - Denis Eremin, Stefan Bienholz, Daniel Szeremley, Jan Trieschmann, Stefan Ries, Peter Awakowicz, Thomas Mussenbrock, Ralf Peter Brinkmann

2016 Plasma Sources Sci. Technol. 25 025020

FTIR spectroscopy of cysteine as a ready-to-use method for the investigation of plasma-induced chemical modifications of macromolecules

2016 - Friederike Kogelheide, Kartaschew, Konstantin, Strack, Martin, Sabrina Baldus, Metzler-Nolte, Nils, Havenith, Martina, Peter Awakowicz, Katharina Stapelmann, Jan Lackmann

DOI: 10.1088/0022-3727/49/8/084004

Diagnostics of plasma processes based on parallelized spatially resolved in-situ reflection measurements

2016 - Christian Schulz, Jan Niclas Runkel, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

IEEE Transactions on Microwave Theory and Techniques, Vol. 64, No. 2, pp. 616-623; DOI: 10.1109/TMTT.2015.2510653; Feb 2016 [IEEE Library]

Diagnostics of Plasma Processes Based on Parallelized Spatially Resolved In-Situ Reflection Measurements

2016 - Christian Schulz, Jan Niclas Runkel, Moritz Oberberg, Peter Awakowicz, Ilona Rolfes

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES Volume: 64 Issue: 2 Pages: 616-623 DOI: 10.1109/TMTT.2015.2510653 Published: FEB 2016 [URL]
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