Veröffentlichungen

Prozesstaugliche Plasmadiagnostik auf Basis der Multipol-Resonanz-Sonde

2012 - Jens Oberrath, Christian Schulz, Robert Storch, Tim Styrnoll, Martin Lapke, Thomas Mussenbrock, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes

16. GMA/ITG-Fachtagung Sensoren und Messsysteme 2012, Nürnberg, 22.-23. Mai (Proceedings: ISBN 978-3-9813484-0-8)

Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma

2012 - Ralf Peter Brinkmann, Jens Oberrath, Peter Awakowicz, Martin Lapke, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll, Christian Zietz

PCT/DE2011/001802, R. P. Brinkmann, J. Oberrath, P. Awakowicz, M. Lapke, T. Musch, T. Mussenbrock, I. Rolfes, C. Schulz, R. Storch, T. Styrnoll, C. Zietz (Erfinder), Ruhr-Universität Bochum (Anmelder), Offenlegung 12.04.2012

Prozessüberwachung und Kontrolle mit der Multipol-Resonanz-Sonde

2012 - Ralf Peter Brinkmann, Martin Lapke, Jens Oberrath, Christian Schulz, Robert Storch, Tim Styrnoll, Peter Awakowicz, Thomas Mussenbrock, Thomas Musch, Ilona Rolfes, Christian Zietz

DPG Früh­jahrs­ta­gung 2012, Stutt­gart, Ger­ma­ny, March 12-16

Numerische Simulation von kapazitiven Mehrfrequenzentladungen für Sputteranwendungen

2012 - Daniel Szeremley, Stefan Bienholz, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Mussenbrock

DPG Früh­jahrs­ta­gung 2012, Stuttgart, Ger­ma­ny, 12-16 March

Dual frequency capacitive plasmas in Fe and Ni sputter applications: correlation of discharge properties on thin film properties

2012 - Stefan Bienholz, Egmont Semmler, Peter Awakowicz, H Brunken, A Ludwig

PLASMA SOURCES SCIENCE & TECHNOLOGY, Volume: 21, Issue: 1, Article Number: 015010, DOI: 10.1088/0963-0252/21/1/015010, Published: FEB 2012

Temperature measurements at thoriated tungsten electrodes in a model lamp and their interpretation by numerical simulation

2011 - Andre Bergner, Michael Westermeier, Cornelia Ruhrmann, Peter Awakowicz, Jürgen Mentel

JOURNAL OF PHYSICS D-APPLIED PHYSICS, Volume: 44, Issue: 50, Article Number: 505203, DOI: 10.1088/0022-3727/44/50/505203, Published: DEC 21 2011

Space-resolved characterization of high frequency atmospheric-pressure plasma in nitrogen, applying optical emission spectroscopy and numerical simulation

2011 - Priyadarshini Rajasekaran, Cornelia Ruhrmann, Nikita Bibinov, Peter Awakowicz

JOURNAL OF PHYSICS D-APPLIED PHYSICS, Volume: 44, Issue: 48, Article Number: 485205, DOI: 10.1088/0022-3727/44/48/485205, Published: DEC 7 2011

Process Diagnostics and Monitoring Using the Multipole Resonance Probe (MRP)

2011 - Jens Harhausen, Peter Awakowicz, Ralf Peter Brinkmann, Rüdiger Foest, Martin Lapke, Thomas Musch, Thomas Mussenbrock, Jens Oberrath, Andreas Ohl, Ilona Rolfes, Christian Schulz, Robert Storch, Tim Styrnoll

64th Annual Gaseous Electronics Conference 2011, Salt Lake City, Utah, USA, Nov 14-18, 2011

Active Plasma Resonance Spectroscopy Using The Multipole Resonance Probe

2011 - Christian Schulz, Martin Lapke, Jens Oberrath, Robert Storch, Tim Styrnoll, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Thomas Mussenbrock, Ilona Rolfes

Kleinheubacher Tagung 2011, U.R.S.I. Landesausschuss in der Bundesrepublik Deutschland e.V., Miltenberg, Germany, Sep 26-28, 2011

Plasma and optical thin film technologies

2011 - O. Stenzel, S. Wilbrandt, N. Kaiser, C. Schmitz, M. Turowski, D. Ristau, Peter Awakowicz, Ralf Peter Brinkmann, Thomas Musch, Ilona Rolfes, H.Steffen, R. Foest, A. Ohl, T. Köhler, G. Dolgonos, T. Frauenheim

Proceedings of the The International Society for Optical Engineering (SPIE), Vol. 8168L (October 04, 2011), pp. 10, DOI: 10.1117/12.895323, Marseille, France, Sep 05, 2011 [SPIE Digital Library]
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